Atomic Layer Deposition of Metal Sulfide Materials

Atomic Layer Deposition of Model Metal Oxide Electrode Architectures

A thorough knowledge of chemical and electrochemical processes that occur at the electrode interface is paramount to the development of improved materials for electrochemical energy storage. One approach is to study model systems with well-defined structures and geometries (architectures) more amenable to systematic and careful study of such materials. The goal of this work is to develop new ap...

Atomic Layer Deposition of Noble Metal Thin Films

3 Preface 4 List of publications 5 List of symbols and abbreviations 6

Atomic Layer Deposition of TiO

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Atomic layer deposition: an overview.

Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement

This paper describes the atomic layer deposition of In2(S,O)3 films by using In(acac)3 (acac = acetylacetonate), H2S and either H2O or O2 plasma as oxygen sources. First, the growth of pure In2S3 films was studied in order to better understand the influence of the oxygen pulses. X-Ray diffraction measurements, optical analysis and energy dispersive X-ray spectroscopy were performed to character...